Comparative study on structure and optical properties of TiO2 films by DC magnetron sputtering and energy filtering magnetron sputtering
ZHAO Zunjie, WANG Zhaoyong, WU Dan, ZHANG Shihui, XIA Yu, YAO Ning
Journal of Functional Materials . 2018, (7): 7088 -7092 .  DOI: 10.3969/j.issn.1001-9731.2018.07.014