Influence of the deposition pressure on the properties of ZnO:Al thin-film produced by r.f. sputtering

Influence of the deposition pressure on the properties of ZnO:Al thin-film produced by r.f. sputtering

Journal of Functional Materials ›› 2015, Vol. 46 ›› Issue (07) : 32-0.

Influence of the deposition pressure on the properties of ZnO:Al thin-film produced by r.f. sputtering

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