The study of SiO2 insulating film for low voltage-driven microfluidic chip

The study of SiO2 insulating film for low voltage-driven microfluidic chip

Hong-feng Lv;Wei-Ping Yan;Jie-Chao Li

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Jorunal of Functional Materials ›› 2012, Vol. 43 ›› Issue (09) : 1204-1206.

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The study of SiO2 insulating film for low voltage-driven microfluidic chip

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