Influences of deposition pressure on the structure and properties of MgO thin films prepared by cathodic vacuum arc deposition

ZHU Daoyun;ZHENG Changxi;WANG Mingdong

Jorunal of Functional Materials ›› 2011, Vol. 42 ›› Issue (07) : 1316-1319.
研究与开发

Influences of deposition pressure on the structure and properties of MgO thin films prepared by cathodic vacuum arc deposition

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