Effect of sputtering power on Mo doped ZnO (MZO) transparent conductive thin films

doi:10.3969/j.issn.1001-9731.2022.02.017

Journal of Functional Materials ›› 2022, Vol. 53 ›› Issue (2) : 2114-2122. DOI: 10.3969/j.issn.1001-9731.2022.02.017

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Effect of sputtering power on Mo doped ZnO (MZO) transparent conductive thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2022, 53(2): 2114-2122 https://doi.org/10.3969/j.issn.1001-9731.2022.02.017

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Received	Revised	Published
2021-08-20	2021-10-20	2022-02-28
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2022-02-28

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