溅射功率密度对IZrO薄膜的结构与性能的影响
张成城, 许积文, 周贤界, 朱归胜, 徐华蕊
Effect of sputtering power density on structure and properties of IZrO thin films
ZHANG Chengcheng, XU Jiwen, ZHOU Xianjie, ZHU Guisheng, XU Huarui
功能材料
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2026, (9): 86
-90
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DOI: 10.3969/j.issn.1001-9731.2026.09.012
