CeO2-Ga2O3共掺杂制备高密度氧化铟锡靶材及其电性能研究
覃洪斌, 陈永华, 董玲, 龙神峰, 徐华蕊, 黄誓成, 朱归胜
Study on the preparation and electrical properties of CeO2-Ga2O3 Co-doped high-density indium tin oxide targets
QIN Hongbin, CHEN Yonghua, DONG Ling, LONG Shenfeng, XU Huarui, HUANG Shicheng, ZHU Guisheng
功能材料
.
2026, (8): 168
-174
.
DOI: 10.3969/j.issn.1001-9731.2026.08.020
