低压化学气相沉积的B掺杂ZnO薄膜的光电性能

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许亚军, 马浩然, 吴珺, 沈鸿烈

Properties of B-doped ZnO films deposited by LPCVD

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功能材料 . 2025, (7): 7217 -7222 . DOI: 10.3969/j.issn.1001-9731.2025.07.027