
低压化学气相沉积的B掺杂ZnO薄膜的光电性能
许亚军, 马浩然, 吴珺, 沈鸿烈
低压化学气相沉积的B掺杂ZnO薄膜的光电性能
Properties of B-doped ZnO films deposited by LPCVD
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