氮化铝薄膜ⅢB族元素掺杂的研究进展

朱焕能, 吴进, 王强

Research progress on doping of aluminum nitride films with Group ⅢB elements

ZHU Huanneng, WU Jin, WANG Qiang

功能材料 . 2025, (7): 7035 -7043 . DOI: 10.3969/j.issn.1001-9731.2025.07.006