晶圆级均匀薄膜的可控制备、表征与优化技术
程正旺, 董嘉晨, 李培, 盛帆, 赵保章, 王昕航, 马新国
Controlled preparation, characterization and optimizing technology of uniform films at wafer scale
CHENG Zhengwang, DONG Jiachen, LI Pei, SHENG Fan, ZHAO Baozhang, WANG Xinhang, MA Xinguo
功能材料
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2026, (5): 76
-87
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DOI: 10.3969/j.issn.1001-9731.2026.05.010
