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			衬底温度对Ta2O5薄膜结构和光学性质的影响
马亚林;石健;李绪诚;杨利忠;邓朝勇
						
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					衬底温度对Ta2O5薄膜结构和光学性质的影响
Effect of Substrate temperature on the Structure and Optical Properties of the Ta2O5 thin film
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