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			氧碳比对MPCVD法同质外延单晶金刚石的影响
吴高华;王兵;熊鹰;等
						
							PDF(3783 KB) 
						
						
					氧碳比对MPCVD法同质外延单晶金刚石的影响
Effect of oxygen-carbon ratio on the homoepitaxial growth of diamond by microwave plasma CVD
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