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电子束蒸发沉积重掺硅薄膜及其在低辐射玻璃上的应用
刘学丽;黄延伟;李向明;席俊华;季振国
PDF(2215 KB)
电子束蒸发沉积重掺硅薄膜及其在低辐射玻璃上的应用
Heavily doped Si film prepared by electron beam evaporation and its application in Low-e glass
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